![]() ![]() RF MEMS switches mostly employ electrostatic actuation due to low power consumption and short switching time as well as compatibility with electrical circuits and components. To close or open MEMS switches the force is applied through electrostatic, magnetic fields or thermally induced forces. Capacitive switches are preferred for higher frequencies. Direct-contact MEMS switches are commonly used for application where the frequency of operation is limited to a few gigahertz. MEMS switches are either direct-contact style or capacitive type. RF and microwave MEMS switches have been subject of many research studies due to their superior performance such as high isolation, low insertion loss, good linearity and low power consumption. Micro-Electro-Mechanical Systems (MEMS) devices have been vastly employed for many applications including Radio-Frequency (RF) components such as RF switches, variable capacitors and inductors.
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